SPIE Frits Zernike Award for Microlithography: Henry I. Smith For seminal contributions in nanolithography, including the invention of phase-shifting masks, demonstration of liquid-immersion ...
Python package for high-performance spatial light modulator (SLM) control and holography. Supports features from aberration-corrected 3D point clouds to automated Fourier-domain calibrations.
SPIE Frits Zernike Award for Microlithography: Henry I. Smith For seminal contributions in nanolithography, including the invention of phase-shifting masks, demonstration of liquid-immersion ...
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